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STRUCTURAL DESIGN OF UNDER BUMP METALLURGY FOR HIGH RELIABILITY BUMPED PACKAGES
STRUCTURAL DESIGN OF UNDER BUMP METALLURGY FOR HIGH RELIABILITY BUMPED PACKAGES
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机译:高可靠碰撞包装下碰撞冶金的结构设计
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摘要
A method for creating an under bump metallization layer (37) is provided. In accordance with the method, a die (33) is provided which has a die pad (35) disposed thereon. A photo-definable polymer (51 or 71) is deposited on the die pad, and an aperture (66) is created in the photo-definable polymer. Finally, an under bump metallization layer (37) is deposited in the aperture. A die package is also provided comprising a die having a die pad (35) disposed thereon, and having an under bump metallization layer (37) disposed on the die pad. The structure has a depression or receptacle (57) therein and has a thickness of at least about 20 microns.
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