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MANUFACTURING METHODS AND VACUUM OR HERMETICALLY PACKAGED MICROMACHINED OR MEMS DEVICES FORMED THEREBY HAVING SUBSTANTIALLY VERTICAL FEEDTHROUGHS
MANUFACTURING METHODS AND VACUUM OR HERMETICALLY PACKAGED MICROMACHINED OR MEMS DEVICES FORMED THEREBY HAVING SUBSTANTIALLY VERTICAL FEEDTHROUGHS
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机译:制造方法以及由此形成的真空或气密包装的微机械或MEMS设备,具有基本上垂直的馈通特性
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摘要
A vacuum or hermetic packaged micromachined or MEMS device and methods for manufacturing the device so that the device has at least one substantially vertical feedthrough are provided. In a first embodiment, the method includes: providing a MEMS device fabricated on a first side of a substrate and located within a vacuum or hermetic cavity; forming at least one hole completely through the substrate between first and second sides of the substrate after the step of providing; and forming a path of electrically conductive material connecting the MEMS device and the second side of the substrate through the at least one hole to form the at least one substantially vertical feedthrough.
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