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Micro-electro-mechanical device, in particular micro-actuator for hard-disk drive, and manufacturing process thereof
Micro-electro-mechanical device, in particular micro-actuator for hard-disk drive, and manufacturing process thereof
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机译:微机电装置,特别是用于硬盘驱动器的微致动器及其制造方法
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摘要
A micro-electro-mechanical device (20) formed by a body (4) of semiconductor material having a thickness and defining a mobile part (23, 24, 31) and a fixed part (3, 25, 30). The mobile part is formed by a mobile platform (23), supporting arms (31) extending from the mobile platform to the fixed part (3, 25, 30), and by mobile electrodes (24) fixed to the mobile platform. The fixed part has fixed electrodes (25) facing the mobile electrodes (24), a first biasing region (3) fixed to the fixed electrodes, a second biasing region (30) fixed to the supporting arms (31), and an insulation region (6) of insulating material extending through the entire thickness of the body (4). The insulation region (6) insulates electrically at least one between the first and the second biasing regions (3, 30) from the rest of the fixed part.
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