Reflective X-ray microscope and inspection system for examining objects with wavelengths 100nm

摘要

A first subsystem with a first concave mirror (S1) and a second convex mirror (S2) both centered on an optical axis (HA) fits in a beam path from an object plane to an image plane and has a first optical element for wavelengths less than 30 nm. A first image (Z) is formed in a first-image plane (2). A second subsystem fits in a beam path after the first image. Independent claims are also included for the following: (a) An inspection system for examining objects, e.g. masks for microlithography with wavelengths less than 100 nm, preferably less than 30 nm; (b) A method for inspecting objects, e.g. masks for microlithography with wavelengths less than 100 nm.