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METHOD AND DEVICE FOR IDENTIFICATION OF CHARACTERS WRITTEN ON A SEMICONDUCTOR SHEET COMPRISING AT LEAST ONE ALIGNMENT MARKER
METHOD AND DEVICE FOR IDENTIFICATION OF CHARACTERS WRITTEN ON A SEMICONDUCTOR SHEET COMPRISING AT LEAST ONE ALIGNMENT MARKER
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机译:识别写在至少一个对齐标记上的半导体表上的字符的方法和装置
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摘要
The invention relates to a method and device for identification of characters written on a semiconductor sheet comprising at least one alignment marker with the following method steps: - gripping the semiconductor sheet between three rotating stops (6, 7, 8) connected to a prehensile arm (5), by means of applying pressure to the periphery thereof, orientation of the gripped sheet by means of rotation of one (8) of the three stops such as to place the marker in a given position, placing means for reflecting (13) specific illuminating beams in a region close to and above the characters for identification, illumination of the characters for identification by means of a specific illuminating beam which is reflected by the means for reflection (13) onto the characters, observation of the characters using the illuminating beams reflected as above and identification of the characters. The invention further relates to a device for identification of characters written on a semiconductor sheet, comprising an alignment marker for carrying out said method.
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