EQUIPMENT AND METHOD FOR MONITORING WAFER MOVING STATE OF WAFER TRANSFER ROBOT

摘要

PURPOSE: A wafer transfer state checking apparatus of a wafer transfer robot and a method thereof are provided to be capable of detecting the contact between a robot arm and an unexpected wafer and generating an interlock signal when transferring an aiming wafer. CONSTITUTION: A wafer transfer state checking apparatus is provided with a transfer robot(10) having a robot arm(12) for transferring a wafer between a carrier(16) and a process module and a contact sensor(18) installed at the lower portion of the robot arm for detecting the contact state of an unexpected wafer. The wafer transfer state checking apparatus further includes a controller(20) for receiving a contact state detecting signal from the contact sensor and outputting an interlock generating signal and an alarm generation controlling signal.