Wafer holder for ultra-high temperature process wafer loading boat and ultra-high temperature furnace having the wafer holder

摘要

PURPOSE: A semiconductor substrate holder for an ultrahigh temperature is provided to prevent a semiconductor substrate from being warped in a high temperature process and avoid a process loss of the semiconductor substrate by installing an additional substrate support part in each slot so as to support the lower part of the semiconductor substrate. CONSTITUTION: The substrate holder(11) is mounted on a substrate loading boat(10) for loading the semiconductor substrate(100) into a high-temperature heat treatment apparatus with a vertical reaction tube(40). The semiconductor substrate is placed on a plate-type support main body. A substrate support part for partially supporting the semiconductor substrate is included in the substrate support main body.