首页> 外国专利> THIN FILM THICKNESS GAUGING METHOD USING CsITl SCINTILATOR INTEGRATED THIN FILM THICKNESS GAUGE AND METHOD FOR THE GAUGE

THIN FILM THICKNESS GAUGING METHOD USING CsITl SCINTILATOR INTEGRATED THIN FILM THICKNESS GAUGE AND METHOD FOR THE GAUGE

机译:使用CsI Tl闪烁器集成的薄膜厚度计的薄膜厚度计和该计的方法

摘要

PURPOSE: A method for measuring a thickness of a thin film using a flash member is provided to measure the thickness of the thin film by using the flash member having strong endurance against exterior impact. CONSTITUTION: An integral type film thickness measuring apparatus includes a radiation source, a detector, a photo-multiplier tube(13), a body part, and a connection part. The detector has a flesh member(3) for detecting gamma rays outputted from the radiation source. The photo-multiplier tube(13) converts light of the flesh member(3) into an electrical signal. The body part has electric circuits. The electric circuits amplify the converted electrical signal and output the number of the gamma rays. The connection part receives power from an exterior of the integral type film thickness measuring apparatus and has a connector(18). The connector(18) receives signals outputted from the electrical circuits and outputs the signals to an exterior of the connector(18).
机译:用途:提供一种使用毛边构件测量薄膜厚度的方法,以通过使用对外部冲击具有强耐久性的毛边构件来测量薄膜的厚度。组成:一体式膜厚测量装置,包括辐射源,检测器,光电倍增管(13),主体部分和连接部分。该检测器具有用于检测从放射线源输出的伽马射线的肉体构件(3)。光电倍增管(13)将肉体构件(3)的光转换成电信号。身体部位有电路。电路放大转换后的电信号并输出​​伽马射线的数量。连接部从一体型膜厚测定装置的外部接受电力,并具有连接器(18)。连接器(18)接收从电路输出的信号,并将信号输出到连接器(18)的外部。

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