METHOD FOR HEATING CRUCIBLE OF EFFUSION CELL USING SUPPLY AC VOLTAGE

摘要

PURPOSE: A method for heating crucible of effusion cell using supply ac voltage is provided to improve energy transfer efficiency and easily and accurately control temperature by constructing filament in such a structure that induced current is created on the surface of the crucible and heating the filament by low frequency AC power. CONSTITUTION: The method comprises the steps of putting an evaporation material that is an object on which a vacuum thin film is formed into the inner crucible; and heating the filament heating element by flowing low frequency AC current to filament heating element so that the heating element radiates heat to heat up the outer crucible formed of metal or graphite, and magnetic flux and eddy current are focused onto the surface layer of the outer crucible by change of magnetic field due to AC current to have heat loss (eddy current loss or hysteresis loss) heat the surface layer of the outer crucible at the same time, wherein the effusion cell comprises a filament heating element(11) for heating the outer crucible, a support part(10) for fixing the outer crucible, an outer crucible(6), an inner crucible(7), a temperature sensor(12), cooling water inflow port and supporting shaft(14), a cooling jacket for emitting heat accumulated according to excessive heating, a shutter(8), a power supply connection wire(13) and a heat reflection plate(16).