The heating method of crucible for effusion cell

摘要

PURPOSE: A method for heating crucible inside effusion cell that is a key component of molecular beam epitaxy system is provided. CONSTITUTION: The heating method of crucible for effusion cell comprises the process of accelerating thermal electrons so that the accelerated thermal electrons are directly collided with the crucible for the effusion cell, wherein high voltage is impressed between a heat element(8) and a conductive crucible(4), temperature of the crucible is controlled by regulating voltage and current, an electrode capable of functioning as a grid(11) is additionally installed between the crucible(4) and the heat element(8) to increase field emission effect, heating temperature is easily controlled by simultaneously controlling current and voltage between the grid(11) and an outer crucible(4), temperature of the crucible is easily controlled by controlling variable voltage (or pulse voltage) and current impressed between the heating element (filament) and the conductive outer crucible, thereby controlling energy transferred, and a crucible type effusion cell comprises a shutter driving motor, a vacuum flange, a shutter shaft, an outer crucible(4), an inner crucible(5), a shutter, a crucible supporting structure, a heat element(8), a temperature sensor, a cooling water inlet and a supporting pillar, a grid(11), an upper insulator(12) and a lower insulator(13).