METHOD AND A DEVICE FOR INSPECTING AN ACTIVE MATRIX SUBSTRATE TO ACCURATELY JUDGE THE DEFECT OF A PIXEL DRIVING CELL ON THE ACTIVE MATRIX SUBSTRATE

摘要

PURPOSE: A method and a device for inspecting an active matrix substrate are provided to accurately judge the defect of a pixel driving cell on the active matrix substrate although deviation exists in the on-resistance of a pixel selection switching element. CONSTITUTION: A charge and discharge circuit(110) successively charges and discharges a capacitance element of each pixel driving cell. The first detection circuit(130) detects a charge current by electric charges stored in each capacitance element on a time axis in a plurality of points. The second detection circuit(140) detects a discharge current from each capacitance element. A judging circuit judges the defect of a plurality of the pixel driving cells by the charge current and the discharge current in a plurality of the points.