METHOD FOR FABRICATING JOSEPHSON JUNCTION DEVICE USING STABLE MGB2 LAYER

摘要

Purpose: a kind of method is arranged to manufacture a device, has a desired characteristic by using a stable MgB2 layers for manufacturing a Josephson junction device. Construction: an Au layers is sequentially formed on a substrate with a photoresist layer. Photoresist layer is patterned. One stage portion is formed in substrate by Au layers of etching and substrate. Thus photoresist layer and Au layers are removed. It is tiltedly deposited by using stage portion as a mask, Mg and B. The MgB2 layers of lower substrate for being respectively formed at a upper substrate and stage portion. One Ag layers is formed in stage portion.