首页> 外国专利> PHOTORESIST COMPOSITION FOR CIRCUIT OF LIQUID CRYSTAL DISPLAY DEVICE, METHOD FOR FORMING PHOTORESIST PATTERN FOR LCD USING THE COMPOSITION AND LCD CONTAINING THE PATTERN FORMED BY THE METHOD

PHOTORESIST COMPOSITION FOR CIRCUIT OF LIQUID CRYSTAL DISPLAY DEVICE, METHOD FOR FORMING PHOTORESIST PATTERN FOR LCD USING THE COMPOSITION AND LCD CONTAINING THE PATTERN FORMED BY THE METHOD

机译:液晶显示器件电路的光致抗蚀剂组合物,使用该组合物形成用于液晶显示器的光致抗蚀剂图案的方法以及包含该方法形成的图案的液晶显示器

摘要

PURPOSE: A photoresist composition for the circuit of a liquid crystal display (LCD) device, a method for forming a photoresist pattern for LCD using the composition and an LCD containing the pattern formed by the method are provided, to reduce the width of CD skew decrease of pattern after Cr etching, thereby improving production yield and productivity. CONSTITUTION: The photoresist composition comprises 10-25 wt% of a novolac resin having a molecular weight of 2,000-12,000; 0.5-6.5 wt% of an acryl resin having a molecular weight of 2,000-25,000 (whose amount is 5-25 wt% based on the amount of the total resin); 3-10 wt% of a diazide-based photosensitive compound; and the balance of an organic solvent. Preferably the diazide-based photosensitive compound is 2,3,4,4'-tetrahydroxybenzophenone-1,2-naphthoquinonediazide-5-sulfonate.
机译:用途:提供用于液晶显示(LCD)装置的电路的光致抗蚀剂组合物,使用该组合物形成用于LCD的光致抗蚀剂图案的方法以及包含通过该方法形成的图案的LCD,以减小CD偏斜的宽度。减少Cr蚀刻后的图案,从而提高产量和生产率。组成:光致抗蚀剂组合物包含10-25重量%的线型酚醛树脂,分子量为2,000-12,000; 0.5-6.5wt%的分子量为2,000-25,000的丙烯酸树脂(其量为5-25wt%,基于总树脂的量); 3-10wt%的基于二叠氮化物的光敏化合物;和其余的有机溶剂。优选地,基于叠氮化物的光敏化合物是2,3,4,4'-四羟基二苯甲酮-1,2-萘醌二叠氮化物-5-磺酸盐。

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