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SEMICONDUCTOR LIGHT RECEIVING DEVICE AND FABRICATING METHOD THEREOF TO IMPROVE LIGHT COLLECTION EFFICIENCY AND PLAN TO INCREASE SENSITIVITY OF EACH LIGHT RECEIVING REGION
SEMICONDUCTOR LIGHT RECEIVING DEVICE AND FABRICATING METHOD THEREOF TO IMPROVE LIGHT COLLECTION EFFICIENCY AND PLAN TO INCREASE SENSITIVITY OF EACH LIGHT RECEIVING REGION
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机译:半导体光接收装置及其制造方法,以提高光收集效率,并计划提高每个光接收区域的灵敏度
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摘要
PURPOSE: A semiconductor light receiving device is provided to improve light collection efficiency and plan to increase sensitivity of each light receiving region by rounding a corner of a transfer electrode adjacent to a light receiving region. CONSTITUTION: A light receiving region is formed on a semiconductor substrate(1). An electrode is formed in the periphery of the light receiving region on the semiconductor substrate to transfer the charges generated by the photoelectric transformation in the light receiving region to the outside of the light receiving region. A part or all of the periphery of the electrode is processed to move back toward the center of the electrode so that the electrode can be separated from the semiconductor substrate.
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