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HIGH PRECISION NANO FINE PATTERN NOT GREATER THAN HUNDRED NANOMETER AND METHOD FOR FORMING MAGNETIC METAL POINT ALIGNMENT TO FREELY SELECT MAGNETIC METAL
HIGH PRECISION NANO FINE PATTERN NOT GREATER THAN HUNDRED NANOMETER AND METHOD FOR FORMING MAGNETIC METAL POINT ALIGNMENT TO FREELY SELECT MAGNETIC METAL
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机译:不超过百纳米的高精度纳米精细图形和形成磁性金属点对准以自由选择磁性金属的方法
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摘要
PURPOSE: A method for forming a magnetic metal point alignment is provided to freely select a magnetic metal and form a metal pattern having a high aspect ratio according to the property of used mask metal by forming metal patterns of various sizes and shapes by a simple method and by previously depositing magnetic metal of a desired property. CONSTITUTION: A regular porous polymer pattern is formed on a metal thin film that needs to be patterned. Mask metal is selectively deposited in a hole. The polymer layer is selectively eliminated. The metal thin film that needs to be patterned is etched.
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