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An integrated circuit and a wiring board including a silicon carbide metal diffusion barrier layer
An integrated circuit and a wiring board including a silicon carbide metal diffusion barrier layer
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机译:包括碳化硅金属扩散阻挡层的集成电路和布线板
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摘要
The present invention relates to the use of silicon carbide as a barrier layer to prevent diffusion of metal atoms between adjacent conductors separated by a dielectric material. According to the present invention, a metal having a small resistance and a dielectric layer having a small dielectric constant can be used for the integrated circuit and the wiring board.
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