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Wavelength-tunable vertical-cavity surface emitting laser device

机译:波长可调垂直腔面发射激光器装置

摘要

PURPOSE: A wavelength-tunable vertical-cavity surface emitting laser device is provided to continuously change an oscillating frequency of an output light within a wide wavelength range as well as to obtain an optimum single longitudinal mode at the same time. CONSTITUTION: A wavelength-tunable vertical-cavity surface emitting laser device includes a substrate(105) formed on a top surface thereof a bottom clad layer(112), an active layer(101) and a top clad layer(111) subsequently. A through hole A is formed at the center of the substrate(105) in such a way that the through hole A penetrates the substrate(105) from the top surface to the bottom surface, thereby exposing the bottom clad layer(112). A bottom electrode(110) is formed on the bottom surface of the substrate(105). A sacrificial layer(103) is formed on the top clad layer(111) and an oxidation layer(102) is inserted into a center portion of the sacrificial layer(103). An aperture B is formed on the center portion of the oxidation layer(102) and a size of the aperture B is controlled by controlling the time of side oxidation. The oxidation layer(102) serves as a current restriction layer for flowing a current through only the aperture B. Therefore, it is suitable for utilizing as an active device in a short optical communication and a large capacity information process of a multi-wavelength transmission.
机译:目的:提供一种波长可调的垂直腔面发射激光器装置,以连续地在宽的波长范围内改变输出光的振荡频率,并同时获得最佳的单纵模。组成:一种波长可调的垂直腔面发射激光器器件,包括在其顶表面上依次形成底部覆盖层(112),有源层(101)和顶部覆盖层(111)的基板(105)。在基板(105)的中央形成有贯通孔A,该贯通孔A使贯通孔(A)从上表面贯通至下表面(105),从而露出下包层(112)。在基板(105)的底面上形成有底部电极(110)。在顶部覆盖层(111)上形成牺牲层(103),并且将氧化层(102)插入到牺牲层(103)的中心部分中。在氧化层(102)的中央部分形成有开口B,通过控制侧面氧化的时间来控制开口B的大小。氧化层(102)用作仅使电流流过孔B的电流限制层。因此,其适合用作短光通信和多波长传输的大容量信息处理中的有源器件。 。

著录项

  • 公开/公告号KR100413912B1

    专利类型

  • 公开/公告日2004-01-07

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20010011652

  • 发明设计人 이용희;김규상;

    申请日2001-03-07

  • 分类号H01S3/08;

  • 国家 KR

  • 入库时间 2022-08-21 22:47:33

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