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METHOD FOR MANUFACTURING A METAL FILM HAVING GIANT SINGLE CRYSTALS AND THE METAL FILM
METHOD FOR MANUFACTURING A METAL FILM HAVING GIANT SINGLE CRYSTALS AND THE METAL FILM
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机译:具有巨型单晶和金属膜的金属膜的制造方法
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摘要
A method of manufacturing a metallic film consisting of giant single crystal grains is disclosed. The method includes depositing the metallic film on a substrate under an atmosphere of an inert gas and a specified additive gas to change a surface energy, grain boundary energy, or internal strain energy of the metallic film. The method also includes annealing step of the resultant of the deposition at a temperature suitable for the grain growth of the metallic film containing the additive gases. According to the method, the metallic film consisting of giant single crystal grains having a grain size whose ratio of thickness to an average grain size of the film is above 50 can be produced without depending upon the kind of substrate and deposition method.
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