MOLECULAR BEAM SOURCE AND MOLECULAR BEAM EPITAXY APPARATUS

摘要

PURPOSE: A molecular beam source is provided to sufficiently secure a filling amount of a molecular beam material even when a crucible is allowed to incline and to obtain stable strength of the molecular beam even when the amount of the molecular beam material is reduced. CONSTITUTION: A molecular beam source cell(101) includes a crucible(102) having an inlet opening part(111) and a heater(103) which is attached to the crucible(102) and heats a molecular beam material filled in the crucible(102) to generate the molecular beam by evaporation and sublimation from the inlet opening part(111). The crucible(102) is bent between a part(108) to be filled with the molecular beam material and the inlet opening part(111) so that the molecular beam material filled in the part(108) can be seen from the inlet opening part(111), and each sectional area in the horizontal direction of the part(108) to be filled with the molecular beam material is made nearly uniform.