Microchannel Array Structure Embedded In Silicon Substrate And Its Fabrication Method

摘要

PURPOSE: A microchannel array structure laid in silicon base plate and manufacturing method of the same are provided to minimize influence on physical and chemical qualities of a lower silicon base plate. CONSTITUTION: A structure includes microchannel arrays(102) laid in a silicon base plate(101) and formed by a plurality of super-fine microchannels integrated in high density; microchannel outer wall membranes(103) evenly deposited on the base plate and the microchannel arrays and interposed between the super-fine microchannels to partition the super-fine microchannels; and a heater or an electrode(104) and an electric connection pad(105) formed on uppers part of the microchannel outer wall membrane.