VACUUM PROCESSING APPARATUS FOR COPING WITH LARGER DIAMETER SAMPLES WHILE KEEPING MANUFACTURING COST TO MINIMUM AND SEMICONDUCTOR MANUFACTURING LINE USING THE SAME

摘要

PURPOSE: A vacuum processing apparatus and a semiconductor manufacturing line using the same are provided to cope with larger diameter samples, restrict increase of manufacturing cost, and acquire at the same time better maintainability. CONSTITUTION: A cassette block(1) includes a first conveying unit(9) into which a plurality of cassettes(12) including samples are loaded. A first vacuum process block(2) includes first load lock chambers connected to the cassette block, a first vacuum process chamber, a second conveying unit for conveying the samples between the first load lock chamber and the first vacuum process chamber. A second vacuum process block includes second load lock chambers connected to the cassette block, a second vacuum process chamber, a third conveying unit for conveying the samples between the second load lock chamber and the second vacuum process chamber. The first conveying unit conveys the samples among one cassette, the first load lock chambers, and the second load lock chambers.