Micro Fabry-Perot filter driven by magnetic force and gas analysis apparatus using the same

摘要

PURPOSE: A very small-sized magnetic force driven Fabry-Perot filter and an apparatus for analyzing a gas by using the same are provided to measure the components and concentration of the gas by detecting the wavelengths of the light subsequently. CONSTITUTION: A very small-sized magnetic force driven Fabry-Perot filter includes a substrate(10), a first etching stop layer(11), a first mirror(21), a sacrificial layer(12), a second mirror(22), a second etching stop layer(13), a circular coil pattern, a first electrode terminal(31), a coil insulating layer(15), a second electrode terminal(32) and a permanent magnet. The substrate(10) is etched at a predetermined region. The first etching stop layer(11) is formed on the top of the substrate(10). The first mirror(21) is formed on top of the first etch stop layer(11) and the sacrificial layer(12) is formed on top of the first mirror(21) to expose the first mirror(21). The second mirror(22) encompasses the top and side of the sacrificial layer(12). The second etching stop layer(13) is formed on top of the second mirror(22). The circular coil pattern is formed on top of the second etch stop layer(13). The first electrode terminal(31) is connected to one side of the circular coil pattern and formed on top of the coil insulation layer(15). The coil insulating layer(15) exposes portions of the first electrode terminal(31) and the circular coil pattern. The second electrode terminal(32) is connected to the exposed circular coil pattern and formed on top of the coil insulation layer(15). And, the permanent magnet is aligned at the top side spaced apart from the circular coil pattern.