Micro actuating apparatus for controlling fluid and micro fluidic control devices using the same

摘要

PURPOSE: A micro actuating apparatus for controlling fluid and a micro fluid control apparatus using the same are provided to be capable of optimizing the transfer of a biomass sample having a high viscosity and conductivity, improving response speed, and operating at low temperature. CONSTITUTION: A micro actuating apparatus for controlling fluid is provided with a silicon substrate(100a), an outer wall(101) formed at the upper portion of the silicon substrate by sequentially depositing a silicon oxide layer and a silicon layer, a mobile structure(102) including at least one pair of leaf springs having a restoring force, connected with the outer wall through both ends of the mobile structure, and an actuator formed at the upper portion of the silicon substrate for driving backward or forward the mobile structure by using the expansion of a heating element(106) due to the supply of voltage.