首页>
外国专利>
A method of obtaining a porous insulating composition (options), the composition used to obtain a porous insulating material (options) and a semiconductor device
A method of obtaining a porous insulating composition (options), the composition used to obtain a porous insulating material (options) and a semiconductor device
展开▼
机译:一种获得多孔绝缘组合物(选项)的方法,用于获得多孔绝缘材料的组合物(选项)和半导体器件
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of forming a porous insulating composition comprising the steps of (A) providing at least one organic sacrificial material/dielectric material composition comprising at least one organic sacrificial material and at least one dielectric material; and (B) removing the at least one organic sacrificial material in the at least one organic sacrificial material/dielectric material composition, in order to generate pores in the at least one dielectric material. Also disclosed is a composition useful in making a porous insulator, comprising a heat-activated, pore-forming, sacrificial material; and a dielectric material. Alternatively, the composition useful in making a porous insulator, comprises at least one pore-forming, organic sacrificial material; and at least one dielectric material, wherein the at least one pore-forming, material is a norbornene-type polymer.
展开▼