METHOD FOR DETECTING PRESENCE OF RESILIENT DEFORMATIONS IN MONO-CRYSTALLINE PLATES AND DEVICE FOR REALIZATION OF SAID METHOD

摘要

FIELD: mono-crystalline plates manufacture technology.;SUBSTANCE: method includes effecting controlled plate with x-ray radiation beam, registering interference pattern for diffraction and determining mutual position of interference maximums, which is used for detecting presence of resilient deformations. Plate treatment is performed using x-ray radiation beam converges to point located inside the plate or under it, and determination of mutual positions of interference maximums is performed for diffraction reflections crystallographic planes H, K or L and non-similar for different crystallographic planes. Device for realization of method contains a source of x-ray radiation with means for forming said beam, preferably in form of focusing x-ray lens, and one or more position-sensitive detectors of x-ray radiation for registering interference pattern for diffraction. Means for forming beam and detector/detectors are mounted with possible concurrent diffraction for several crystallographic planes and receiving diffracted radiation within all range of angles, containing interference maximums matching reflections from said crystallographic planes.;EFFECT: higher reliability of control, possible continuous control of various stages of manufacturing process.;2 cl, 9 dwg