PROBLEM TO BE SOLVED: To prevent a basal plate from being broken by detecting deformations such as warpage of the basal plate before processing the basal plate.;SOLUTION: A mechanism 123 which detects deformations of the basal plate W is equipped with supporting members 122A, 122B and 122C which support the basal plate W, a light projection section 141 which projects light, and a light reception section 142 which receives the light projected by the projection section 141. The light projected by the projection section 141 is made to pass through a first optical path L1 extending above a position where the upper surface of the basal plate W supported by the supporting members 122A, 122B and 122C should be positioned when the basal plate W is normal, and to pass through a second optical path L2 extending below a position where the under surface of the basal plate W should be positioned.;COPYRIGHT: (C)2009,JPO&INPIT
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