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A stacked and filled capacitive microelectromechanical ultrasonic transducer for ultrasonic systems for the medical diagnosis and therapy
A stacked and filled capacitive microelectromechanical ultrasonic transducer for ultrasonic systems for the medical diagnosis and therapy
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机译:用于医学诊断和治疗的超声系统的堆叠和填充电容式微机电超声换能器
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摘要
Ultrasonic transducer, of the ultrasonic radiation can be transmitted, wherein the transducer comprises a substrate, which has a plurality of chambers, which are arranged along a direction substantially parallel to the direction of the ultrasonic radiation are stacked.
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