Chemical vapor deposition device for coating of workpieces, preferably plastic bottles, comprises a transport unit, coating stations, an evacuating unit, and a unit for producing a plasma in partial regions of the coating stations

摘要

Device for chemical vapor deposition (CVD) coating of workpieces comprises a transport unit (2), coating stations (31, 32, 33, 34), an evacuating unit (19), and a unit for producing a plasma in partial regions of the coating stations. At least two workpieces are received by at least one of the coating stations. An independent claim is also included for a process for CVD coating workpieces using the above device.