Characterization of Anti-Reflection Coatings Produced by a Microwave Plasma-Enhanced Chemical Vapor Deposition Roll-to-Roll Coater

摘要

Microwave plasma-enhanced chemical vapor deposition (MPECVD) can deposit high-quality, optical thin films at high deposition rates. In this paper, we present the process development. results from experiments performed in a pilot-scale MPECVD roll-to-roll coater. Webs, up to 0.6 m in width, were coated with high, ex. TiO2, and low, ex. SiO2, refractive index coatings. Both optical and mechanical data will be presented and correlated with process conditions.