3D object measurement method and metrology system, whereby at least 3D and 2D object measurement devices are used and the first measurement set is used to create correction values for the second measurement process

摘要

Metrology system has a combination of at least two optical measurement devices. The system comprises a first measurement device for 3D measurement of the object using planar object (2) illumination and a first image capture device (6). A second measurement device is suitable for measurement of 2D profiles of the object and a possible third device is suitable for point measurements on the object surface. Measurement devices and object are moved relative to each other by a control device, which uses the measurements of one device to control movement of the other or others. An Independent claim is made for 3D object measurement method in which at least 3D and 2D object measurements are implemented and the first set of measurements then used to determine correction parameters for implementation of the second measurement method.