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Process for coating a substrate used in the production of dielectrics or ferroelectrics in the manufacture of memory chips in microelectronics comprises applying a suspension onto a substrate, vaporizing the substrate, and sintering
Process for coating a substrate used in the production of dielectrics or ferroelectrics in the manufacture of memory chips in microelectronics comprises applying a suspension onto a substrate, vaporizing the substrate, and sintering
Process for coating a substrate comprises: applying a finely divided suspension having crystalline oxide particles onto a substrate; vaporizing the substrate; and sintering the coating on the substrate.
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