首页> 外国专利> Method for producing a layer system on a dielectric substrate having a first reflecting metal layer and a layer structure, comprises applying the first metal layer on the substrate by a vacuum coating process

Method for producing a layer system on a dielectric substrate having a first reflecting metal layer and a layer structure, comprises applying the first metal layer on the substrate by a vacuum coating process

机译:在具有第一反射金属层和层结构的介电基板上生产层系统的方法,包括通过真空涂覆工艺在基板上施加第一金属层

摘要

The method for producing a layer system on a dielectric substrate (10) having a first reflecting metal layer (20) and a layer structure, which is arranged on the side of the first metal layer opposite to the substrate with a further reflecting metal layer (40) and an insulation layer (30) arranged between the first- and further metal layers, comprises applying the first metal layer on the substrate by a vacuum coating process, and applying the transparent insulation layer on the first metal layer and the further metal layer on the insulation layer by the further vacuum coating process. The method for producing a layer system on a dielectric substrate (10) having a first reflecting metal layer (20) and a layer structure, which is arranged on the side of the first metal layer opposite to the substrate with a further reflecting metal layer (40) and an insulation layer (30) arranged between the first- and further metal layers, comprises applying the first metal layer on the substrate by a vacuum coating process, and applying the transparent insulation layer on the first metal layer and the further metal layer on the insulation layer by the further vacuum coating process for the production of the layer structure. The first metal layer and the further metal layer have a surface resistance of greater than 10 MOhm. The transparent insulation layer has an average transmittance of greater than 50%. The number (n) of the application steps is greater than 0, so that the average total reflection factor of the first metal layer and the layer structure is greater than 40%. One of the metal layers has an average reflection factor of = 50% or = 25%. A physical vapor deposition process or a chemical vapor deposition process is assigned as the vacuum coating process. The insulation layer is completely or partially applied by oxidation, nitridation and/or carbidation of the arranged metal layer. A silicon oxide layer is used as insulation layer. The vacuum continuously remains during the production of the layer system. The insulation layer is applied on the top metal layer of the layer structure. A covering layer (50) is applied on the top of the metal layer or on the top of the insulation layer. An adhesive layer is applied between the first metal layer and the substrate. An independent claim is included for a layer system on a dielectric substrate having a first reflecting metal layer and a layer structure.
机译:在具有第一反射金属层(20)和层结构的介电衬底(10)上制造层系统的方法,该层系统布置在第一金属层的与衬底相对的具有另一反射金属层的一侧上( 40)和设置在第一金属层和另一金属层之间的绝缘层(30),包括通过真空涂覆工艺将第一金属层施加在基板上,以及将透明绝缘层施加在第一金属层和另一金属层上通过进一步的真空镀膜工艺在绝缘层上进行喷涂。在具有第一反射金属层(20)和层结构的介电衬底(10)上制造层系统的方法,该层系统布置在第一金属层的与衬底相对的具有另一反射金属层的一侧上( 40)和设置在第一金属层和另一金属层之间的绝缘层(30),包括通过真空涂覆工艺将第一金属层施加在基板上,以及将透明绝缘层施加在第一金属层和另一金属层上通过进一步的真空涂覆工艺在绝缘层上形成层结构。第一金属层和另一金属层的表面电阻大于10MOhm。透明绝缘层的平均透射率大于50%。施加步骤的数量(n)大于0,使得第一金属层和层结构的平均全反射率大于40%。金属层之一的平均反射系数为= 50%或= 25%。物理气相沉积工艺或化学气相沉积工艺被指定为真空涂覆工艺。通过所布置的金属层的氧化,氮化和/或碳化来完全或部分地施加绝缘层。氧化硅层用作绝缘层。在生产层系统的过程中,真空一直保持不变。绝缘层被施加在层结构的顶部金属层上。在金属层的顶部或绝缘层的顶部上施加覆盖层(50)。在第一金属层和基板之间施加粘合剂层。对于具有第一反射金属层和层结构的介电基板上的层系统包括独立权利要求。

著录项

  • 公开/公告号DE102007033665A1

    专利类型

  • 公开/公告日2009-01-22

    原文格式PDF

  • 申请/专利权人 LEYBOLD OPTICS GMBH;

    申请/专利号DE20071033665

  • 发明设计人 URBAN LUDGER;SCHMAUDER TORSTEN;

    申请日2007-07-17

  • 分类号C23C14/24;C23C16/44;

  • 国家 DE

  • 入库时间 2022-08-21 19:09:43

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