Vacuum treatment unit for coating glass components has at least two adjacent chambers or chamber regions separated from each other by walls with an opening via a valve device

摘要

A vacuum treatment unit, especially for continuous coating of a continuous substrate, preferably a glass coating unit, has at least two, preferably more than two, adjacent chambers (20, 30), or chamber regions (21, 22, 31, 32, 33), separated from each other by walls (24, 36, 37), with an opening via a valve device for vacuum tight separation of the chambers, which is releasable in the chamber and is fixed to the inner side of the chamber and separating wall.