Lewis - base - adducts of anhydrous mononuclear tris (beta - diketonate) bismuth - compounds for the application of bismuth containing layers and process for their preparation

摘要

Anhydrous mononuclear Lewis base adducted tris(β-diketonato) bismuth complexes, useful as precursors for chemical vapor deposition of bismuth, for producing Bi-containing films of significantly improved stoichiometry, morphology and functional character, as compared to films obtained from dinuclear tris(β-diketonato) bismuth complexes of the prior art.