MEMS ELEMENT, OPTICAL MEMS ELEMENT, DIFFRACTION TYPE OPTICAL MEMS ELEMENT AND LASER DISPLAY

摘要

PROBLEM TO BE SOLVED: To reduce deflection of a beam due to internal stress of a laminated film in an electrostatic drive type MEMS element such as an optical MEMS element.;SOLUTION: This MEMS element has a beam 36 formed of a multi-layer, and a stress balance adjusting layer 41 for restraining the deflection of the beam 36 is formed in the multi-layer.;COPYRIGHT: (C)2006,JPO&NCIPI