METHOD AND APPARATUS FOR MEASURING DYNAMIC LINEARITY OF LASER VIBRATION METER, AND LASER DISPLACEMENT METER

摘要

PROBLEM TO BE SOLVED: To easily and accurately measure dynamic linearity, for evaluation, of a laser vibration meter and a laser interferometer that are used in the important fields of industry.;SOLUTION: Two flying bodies on the concentric circle are launched from a double firing tube, to hit one end part of a metal rod independently, simultaneously, or with a specified time lag, to generate elastic wave pulses in the metal rod. The kinetic speed and distortions at the end face, caused when the elastic wave pulses generated when the flying bodies collide reaches the other end part of the metal rod, are measured with the laser vibration meter or laser displacement meter which is to be the object of evaluation. Further, measurement is made with a laser interferometer, which is a reference, or with a distortion gauge provided to the side surface of the metal rod, for the calculation of measurement signal and appropriate correction, as well. The calculation result is compared with the measurement value of laser vibration meter or of laser displacement meter for time domain and frequency domain, so that the dynamic linearity of the laser vibration meter or of the laser displacement meter is measured for evaluation.;COPYRIGHT: (C)2005,JPO&NCIPI