AMORPHOUS CARBON, AMORPHOUS CARBON COATING FILM MEMBER AND METHOD OF FORMING AMORPHOUS CARBON FILM

摘要

PROBLEM TO BE SOLVED: To provide soft amorphous carbon having a low elastic modulus, an amorphous carbon coating film member consisting of the amorphous carbon and a method of forming the amorphous carbon film.;SOLUTION: The amorphous carbon consists essentially of carbon, contains 30 at% and ≤60 at% hydrogen and has 40 to 150 GPa elastic modulus. The amorphous carbon coating film member consists of a conductive base material 22, and a coating film fixed at least at part of the surface of the base material 22 and consisting of the amorphous carbon. The method of forming the amorphous carbon film comprises forming the amorphous carbon film on the surface of the conductive base material 22 by the plasma CVD method. A plurality of the base materials 22 are arranged so as to face each other on a base material holding tool 21 which is disposed in a film forming furnace 11 and connected to a negative pole. The pressure of treating gas and a plasm power source are operated so that the negative glows 24 of two adjacent base materials 22 overlap each other.;COPYRIGHT: (C)2005,JPO&NCIPI