AG-BASED ALLOY WIRING ELECTRODE FILM FOR FLAT PANEL DISPLAY AND AG-BASED ALLOY SPUTTERING TARGET, AND FLAT PANEL DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide an Ag-based alloy wiring electrode film for a flat panel display (FPD) having low electric resistivity, high heat resistance, and high micro-fabricatability in combination, and an Ag-based alloy sputtering target used for forming the Ag-based alloy wiring electrode film, and a flat panel display having the Ag-based alloy wiring electrode film.;SOLUTION: The Ag-based alloy wiring electrode film for the flat panel display constitutes wiring electrode films 3, 4, 5, 6 and 7 to be connected to a TFT 2 for driving a display pixel of the flat panel display of an active type. The wiring electrode films 3, 4, 5, 6 and 7 are formed of the Ag-based alloy containing 0.1 to 1.5at% Nd and consisting of the balance substantially Ag. One or two or more elements selected from further Cu, Au, Pd, and Bi in addition to Nd can be incorporated at 0.01 to 1.5at% into the Ag-based alloy.;COPYRIGHT: (C)2005,JPO&NCIPI