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And Ag-based alloy sputtering target and flat panel display for Ag-based alloy wire electrode film, flat panel display

机译:用于Ag基合金丝电极膜的Ag基合金溅射靶及平板显示器,平板显示器

摘要

PROBLEM TO BE SOLVED: To provide an Ag-based alloy wiring electrode film for a flat panel display which has excellent electrical conductivity and has sufficient cohesion resistance even when it is repeatedly subjected to high temperature heating treatment in the air.;SOLUTION: The Ag-based alloy wiring electrode film for a flat panel display comprises 0.01 to 1.5at% Bi (can comprise one or more kinds selected from the group composed of Cu, Au and Pd by 0.1 to 1.5at% in total), and the remainder substantially composed of Ag.;COPYRIGHT: (C)2006,JPO&NCIPI
机译:要解决的问题:提供一种用于平板显示器的基于银的合金布线电极膜,该膜即使在空气中反复经受高温热处理也具有优异的导电性并且具有足够的耐粘结性。用于平板显示器的铝基合金布线电极膜包含0.01到1.5at%的Bi(可以包含一种或多种选自Cu,Au和Pd的总量总计0.1到1.5at%的Bi),其余基本上由Ag。组成;版权所有:(C)2006,JPO&NCIPI

著录项

  • 公开/公告号JP4264397B2

    专利类型

  • 公开/公告日2009-05-13

    原文格式PDF

  • 申请/专利权人 株式会社神戸製鋼所;

    申请/专利号JP20040257632

  • 申请日2004-09-03

  • 分类号C22C5/06;C23C14/34;G02F1/1343;G09F9/30;H01L21/28;H01L21/285;H01L21/3205;H01L23/52;H01L29/786;

  • 国家 JP

  • 入库时间 2022-08-21 19:39:32

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