INORGANIC POROUS THIN FILM WHERE CARBON NANOTUBES ARE FORMED IN THE PORES, LAMINATED BODY, AND MANUFACTURING METHOD FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To prepare an inorganic porous thin film where a large number of pores with a required shape are arranged in a single layer and carbon nanotubes are selectively grown in the pores, a laminated body made of the same, and a method for manufacturing the inorganic porous thin film.;SOLUTION: The inorganic porous thin film 10 has a large number of pores 5 having an opening 1 with a nearly circular shape and an inner peripheral face 3 with a nearly spherical shape and carbon nanotubes 6 are formed in the pores 5. The pores 5 are arranged in the single layer along the flat surface of the thin film 10. The average diameter d1 of the openings 1 is 30-3,000 nm and the average distance between the centers of the neighboring pores d2 is 100-230% of the average diameter d1 of the openings 1. The thickness of the film d3 is 30-100% of the average diameter d1 of the openings 1. The average diameter of the carbon nanotubes 6 is 0.4-50 nm and the average length is 10-1,000 nm.;COPYRIGHT: (C)2005,JPO&NCIPI