SELECTING METHOD AND SYSTEM OF VIRTUAL PROFILE USED FOR OPTICAL MEASUREMENT, AND RECORDING MEDIUM HAVING CODES CAPABLE OF BEING EXECUTABLE BY COMPUTER SELECTING VIRTUAL PROFILE

摘要

PPROBLEM TO BE SOLVED: To provide a method and system for selecting an appropriate model of a virtual profile used for determining the profiles of a structure on a semiconductor wafer using optical measurement. PSOLUTION: Sample diffraction signals are acquired from the measured diffraction signals of a structure that is formed on a wafer as a representative sample of the measured diffraction signals. The virtual profiles are defined and evaluated by using one sample diffraction signal from the acquired sample diffraction signals. PCOPYRIGHT: (C)2005,JPO&NCIPI