Storage medium having computer-executable code for selecting method of selecting a virtual profile used for the optical measurement, the hypothetical profile system and

摘要

PROBLEM TO BE SOLVED: To provide a method and system for selecting an appropriate model of a virtual profile used for determining the profiles of a structure on a semiconductor wafer using optical measurement.;SOLUTION: Sample diffraction signals are acquired from the measured diffraction signals of a structure that is formed on a wafer as a representative sample of the measured diffraction signals. The virtual profiles are defined and evaluated by using one sample diffraction signal from the acquired sample diffraction signals.;COPYRIGHT: (C)2005,JPO&NCIPI