METHOD OF PRODUCING THIN FILM, THIN FILM PRODUCED THEREBY, STACKED THIN FILM, TRANSPARENT PLASTIC FILM, AND ORGANIC EL ELEMENT WITH STACKED THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a transparent, highly gas-barrier thin film by a method high in productivity without using a vacuum process, to provide a highly transparent, water vapor-barrier thin film having high surface hardness, a high contact angle and a reduced center line average roughness in the surface, to provide a stacked thin film, to provide a transparent plastic film excellent in adhesion with a plastic base material or the like or using the thin film as a gas barrier layer, and to provide an organic EL (electroluminescence) element with the stacked thin film.;SOLUTION: In the method of producing a thin film, reactive gas is fed between opposite electrodes under the atmospheric pressure or under the pressure in the vicinity of the atmospheric pressure, and high frequency voltage is applied so as to convert the reactive gas into an excited state, and a base material is exposed to the reactive gas in the excited state, so that a hydrogenated amorphous silicon carbide thin film having a composition expressed by general formula (1) is deposited: the general formula (1) is SiC_x:H (wherein, x denotes 1.01 to 2.0).;COPYRIGHT: (C)2005,JPO&NCIPI