METHOD OF MANUFACTURING OPTICAL DISK STAMPER, OPTICAL DISK STAMPER AND OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To provide a negative resist material capable of making the recording density of an optical disk high and simplifying a stamper manufacturing process at the time of injection-molding an optical disk substrate.;SOLUTION: The negative inorganic resist material is obtained by using an argon-oxygen mixed gas having a flow ratio of 75:25 as a film-deposition gas when film-depositing an inorganic resist material composed of oxides of transition metals e.g. tungsten W and molybdenum Mo by sputtering. The inorganic resist material is film-deposited on the substrate and exposed to a laser beam and an exposed part corresponding to grooves is left after development to obtain a resist pattern. A master stamper is manufactured of the resist pattern and the disk substrate having the projecting grooves on a reading surface can be manufactured by using the master stamper.;COPYRIGHT: (C)2005,JPO&NCIPI