METHOD OF MANUFACTURING COLUMNAR NANO-CRYSTAL BODY AND SILICON COLUMNAR NANO-CRYSTAL BODY

摘要

PPROBLEM TO BE SOLVED: To provide a method of efficiently and surely manufacturing a nano-sized columnar crystal body comprising a group IIIB or IVB element such as silicon, boron or carbon. PSOLUTION: In the method of manufacturing the columnar nano-crystal body, the columnar nano-crystal body of the element is formed by irradiating a target containing at least one element selected from a group comprising IIIB or IVB elements with pulse laser beam at 10SP15/SP-10SP21/SPW/cmSP2/SPirradiation intensity to produce the scattered particles and binding the scattered particles of the element. PCOPYRIGHT: (C)2005,JPO&NCIPI