METHOD FOR MANUFACTURING SILICON NANO-CRYSTAL MATERIAL AND SILICON NANO-CRYSTAL MATERIAL MANUFACTURED BY THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for efficiently manufacturing a silicon nano-crystal material having a plurality of silicon nano-crystal wires by a solid phase epitaxial growth in an extremely simple process, and to provide a silicon nano-crystal material by the method.;SOLUTION: A silicon nano-crystal material 12 comprising silicon nano-crystal wires 11 is manufactured by forming nano-holes 6 in a silicon oxide thin film 2 formed on the surface of a silicon substrate 1, the nano-holes 6 having a desired size and reaching the surface of the silicon substrate 1 in two-dimensional arrangement, supplying and depositing silicon 10 in the nano-holes 6 by a laser ablation method, and heating to epitaxially grow the silicon 10 in a solid phase from the silicon substrate 1 in the nano-holes 6 to produce single crystal silicon nano-crystal wires 11.;COPYRIGHT: (C)2007,JPO&INPIT