MANUFACTURING METHOD OF MESO-STRUCTURED SILICA THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a technique for improving the regularity of the meso-structure by a simple means in preparing a meso-structured silica thin film.;SOLUTION: A reaction solution comprising a template molecule, a silica source, a sol-gel reaction catalyst, water, and if necessary an organic solvent is prepared and subjected to a sol-gel reaction. While the sol-gel reaction is proceeding, the solution is applied to a substrate, and the resultant coating film is dried while the proceeding of drying is being suppressed. Preferably, the coating film is dried while the proceeding of the drying is being suppressed, by drying the coating film in an enclosed space.;COPYRIGHT: (C)2005,JPO&NCIPI