METHOD OF MANUFACTURING CARBON NANOTUBE ARRAY, USING SELF-AGGREGATION OF ORGANIC SUPERMOLECULE AND STAINING OF METAL COMPOUND, AND BIOCHIP

摘要

PROBLEM TO BE SOLVED: To provide a CNT array manufacturing method for immobilizing a CNT onto a metal catalyst nano-pattern formed using self-aggregation of an organic supermolecule and staining of a metal compound.;SOLUTION: This CNT nano-array manufacturing method includes (a) a step for forming a thin film of a metal catalyst selected from Fe, Ni, Co and alloy of the metals, on a substrate, (b) a step for forming the organic supermolecule inducing the self-aggregation on the metal catalyst thin film, (c) a step for self-aggregating the organic supermolecule by annealing to form regular structure, (d) a step for staining the regular structure with the metal compound, (e) a step for removing a portion not stained with the metal compound, using the thin film as a mask, to form a nano-pattern of the organic supermolecule, (f) a step for forming the nano-pattern of the organic supermolecule through ion milling using the nano-pattern as a mask, and (g) a step for arraying the CNT vertical-directionally on the nano-pattern.;COPYRIGHT: (C)2005,JPO&NCIPI