Manufacturing method of a carbon nanotube array and a biochip using the staining of self-assembly and metal compounds of organic supramolecular

摘要

A method for fabricating a carbon nanotube (CNT) nanoarray, which includes the steps of forming a thin film of supramolecules on a substrate on which metal catalyst for CNT synthesis is deposited, inducing the self-assembly of the supramolecules by annealing to form a regular structure, selectively staining the formed regular structure with a metal compound, etching the metal compound-stained thin film to form a nanometer or smaller size pattern, forming a nanopattern of metal catalyst by using the nanopattern of supramolecules stained with the formed metal compounds, and growing carbon nanotubes (CNTs) vertically on the formed metal catalyst nanopattern. A biochip is readily fabricated by binding bioreceptor(s) to CNTs of the CNT nanoarray.