SCANNER DRIVING CIRCUIT, LASER BEAM MACHINING DEVICE AND METHOD OF ADJUSTING SCANNER DRIVING CIRCUIT

摘要

PPROBLEM TO BE SOLVED: To provide a scanner driving circuit or the like in which a high quality drawing is possible even at a higher rotation speed of a scanner. PSOLUTION: The scanner driving circuit is provided with: a plurality of mirrors which totally reflects light; a motor which turns mirrors fixed on respective rotation shafts; a scanner driving part 73 for controlling the light to scan a desired direction by driving the motor; a position detection part 75 which detects the turning angle of the mirrors and transmits the angle as positional signals to the scanner driving part 73; a scanner control part 74 for inputting a control signal for controlling the mirrors to a desired turning angle to the scanner driving part 73; and an adjustment mechanism 76 for adjusting the traces of the temporal change of the turning angles of mirrors to be identical for every mirror on the basis of a control signal which is measured on the basis of the control signal outputted from the scanner control part 74 and the positional signals outputted from the position detection part 75. PCOPYRIGHT: (C)2005,JPO&NCIPI